[分享]Refractive projection objective（折射投影物鏡）--版主繼續(xù)革命！！ [復(fù)制鏈接]

Abstract O\SH;y,N  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. ?bPW*A82{q  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) T>pyYF1Q  
Correspondence Name and Address:     SUGHRUE MION, PLLC ]N2! 'c  
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Assignee Name and Adress: CARL ZEISS SMT AG 9}_'  
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Serial No.: 931051 nu)YN1 *  
Series Code: 10 W^7yh&@lU  
Filed: September 1, 2004 .D*~U
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U.S. Current Class: 359/649 @?jtB  
U.S. Class at Publication: 359/649 M0g=gmau  
Intern'l Class: G02B 003/00; G02B 009/00 YG /@=Z.  
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Foreign Application Data :`4F0
 
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