[分享]Refractive projection objective（折射投影物鏡）--版主繼續(xù)革命！！ [復(fù)制鏈接]

Abstract hy3?.  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. " "CNw-^t  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) oP:OurX8V  
Correspondence Name and Address:     SUGHRUE MION, PLLC yQFZRDV~  
  2100 PENNSYLVANIA AVENUE, N.W. ?zYR;r2'b)  
  SUITE 800 FX~
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  WASHINGTON {!pYQ|#  
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  20037 (cp$poo  
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