我這里有一篇關(guān)于霍爾源的文章,拿出來大家分享吧!
x";.gjI |g cw]>a&d 關(guān)于霍爾離子源的幾個問題
;=VK_3" 尤大偉 任荊學(xué) 黃小剛 武建軍
@VC9gdO/ (中國科學(xué)院空間中心 北京8701信箱 100080 )
[{p?BTs Several concerning about Hall Ion Source for assisted deposition.
H"GE\ You dawei Ren jingxue Huang xiaogang Wu jianjun
y~c4:*L3 (Soace Science and Application Research Center Academy Cinica P.O.Box8701 Beijing 100080 P.R.China )
ym*#ZE`B! Abstract: the object of our efforts is to improve design of Hall Ion Source in order to obtain broad energy range, large ion beam current, low gas cost, low contaminations and automatic control performances.
PP[)h,ZL* 摘要:本文目的在于改進(jìn)霍爾源的設(shè)計(jì),實(shí)現(xiàn)寬能、大束流、低氣耗、低污染、能自動化控制的新一代霍爾源。
JeTrMa